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In the course of a feasibility study at the FEOL of §the 300 mm semiconductor Fab of Qimonda Dresden, a §system for multivariate analysis of time-resolved §raw data originating from wafer processing tools was §instituted. This system called MORDA (Multivariate §Offline Raw Data Analysis) closed the gap §between online Fault Detection and Classification §basing on statistical key numbers, and offline §PCA, PLS and Batch Modelling to diagnose and §classify the root causes of Low Yielding Wafers that §could not be explained by classical FDC.